Turck single-axis MEMS inclinometer sensor

The single-axis inclinometer sensor detects angular tilt with an adjustable measuring range of 360° and fulfils feedback requirements for applications such as levelling platforms, or controlling tilt angle in a range of industries.

The sensor measures angular tilt in reference to gravity. To deliver precise measurements, the inclinometer uses a MEMS device that incorporates a micro-electro-mechanical capacitive element into the sensor.

The device consists of two parallel plate electrodes, one stationary and one attached to a spring-mass system. As the inclinometer tilts with the attached equipment, its acceleration produces deflection in the non-stationary electrode. The result is a measurable change in the capacitance between the two plates that is proportional to the angle of deflection. These signals have been conditioned to produce a single analog voltage output (0.1 to 4.9 VDC) or current output (4-20 mA).

The inclinometer’s MEMS technology uses a microboard design for accuracy, within a compact package. Suitable for challenging environments, the inclinometer is IP68 rated and offers a wide temperature range of -30 to 70°C.